Emission feedback control system for sub-millisecond laser spike anneal | Semantic Scholar
Transient Laser-Annealing-Induced Mesophase Transitions of Block Copolymer–Resol Thin Films | ACS Polymers Au
Laser Annealing
NextGenLog: #CHIPS: "Laser-spike annealing could boost litho"
Doping of semiconductor devices by Laser Thermal Annealing - ScienceDirect
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Electronics | Free Full-Text | Ultra-Short Pulsed Laser Annealing Effects on MoS2 Transistors with Asymmetric and Symmetric Contacts
Applied Sciences | Free Full-Text | Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process
Table I from Laser Spike Annealing for Shallow Junctions in Ge CMOS | Semantic Scholar
How Does Laser Annealing Work? | Laserax
Laser spike annealing resolves sub-20nm logic device manufacturing challenges | Semiconductor Digest
Molecular Simulations of Laser Spike Annealing of Block Copolymer Lamellar Thin-Films | Langmuir
Laser Annealing
CMOS Leakage Reduction using Laser Spike Annealing
Researchers from Cornell advance lithography with LSA tech
Laser annealing tipped for fab development
Laser annealing of electrodeposited CuInSe 2 semiconductor precursors: experiment and modeling - Journal of Materials Chemistry C (RSC Publishing) DOI:10.1039/C6TC03623F
Experimental setup of single pulse laser annealing. (a) Schematics of... | Download Scientific Diagram
Configuration of a laser spike annealing system [3]. | Download Scientific Diagram
Block diagram of a laser spike annealing system (CO 2 beam only). | Download Scientific Diagram
Laser annealing applications for semiconductor devices manufacturing - ScienceDirect
